中国科学院福建物质结构研究所林启普团队实现了亚硒酸盐导向的有机锡氧代大环用于纳米光刻。2025年5月5日出版的《德国应用化学》杂志发表了这项成果。

具有增强的极紫外（EUV）光子捕获能力和亚50 nm光刻分辨率的有机锡氧代大环的系统设计仍然是推进纳米制造技术的关键挑战。

研究组提出了一系列新的多核丁基锡氧大环——Sn₈、Sn₁₂-α、Sn₁₂-β和Sn₁₂Fe₁₈——通过亚硒酸盐配体驱动的超分子组装构建。其中，Sn12-α表现出卓越的电子束光刻（EBL）性能，在50μC·cm^-2的低剂量下实现了50 nm的临界尺寸分辨率，这归因于其较高的Sn/Se含量、紧凑的分子结构（直径1.5 nm）和优异的成膜能力（表面粗糙度0.59 nm）。 

通过用无机亚硒酸盐代替传统的羧酸盐配体，这项研究解决了传统有机锡-氧代体系固有的结构多样性和EUV吸收效率方面的长期局限性。这些发现为通过配体驱动的簇维度控制设计金属氧化物光致抗蚀剂建立了一个范式，为下一代半导体制造提供了一条可扩展的高灵敏度、高分辨率图案化途径。

附：英文原文

Title: Selenite-Directed Organotin-Oxo Macrocycles for Nanolithography

Author: Juan Wang, Ming-Bu Luo, Zi-Juan Wei, Er-Xia Chen, Jin-Xia Yang, Jian Zhang, Qipu Lin

Issue&Volume: 2025-05-05

Abstract: The systematic design of organotin-oxo macrocycles with enhanced extreme ultraviolet (EUV) photon-harvesting capability and sub-50 nm lithographic resolution remains a pivotal challenge in advancing nanofabrication technologies. Herein, we present a novel series of polynuclear nbutyltin-oxygen macrocycles—Sn8, Sn12-α, Sn12-β, and Sn12Fe18—constructed through selenite ligand-driven supramolecular assembly. Among these, Sn12-α demonstrated exceptional electron beam lithography (EBL) performance, achieving a critical dimension resolution of 50 nm at a low dose of 50 μC·cm-2, attributed to its elevated Sn/Se content, compact molecular architecture (diameter, 1.5 nm), and excellent film-forming ability (surface roughness, 0.59 nm). By replacing conventional carboxylate ligands with inorganic selenite, this study addresses longstanding limitations in structural versatility and EUV absorption efficiency inherent to traditional organotin-oxo systems. These findings establish a paradigm for engineering metal-oxide photoresists through ligand-driven cluster dimensionality control, offering a scalable pathway to high-sensitivity, high-resolution patterning for next-generation semiconductor manufacturing.

DOI: 10.1002/anie.202508220

Source: https://onlinelibrary.wiley.com/doi/10.1002/anie.202508220