近日，北京理工大学钟海政团队研究了面向彩色转换微显示的高分辨率微QLED光刻制备。这一研究成果发表在2025年10月20日出版的《光：科学与应用》杂志上。

微显示面板是元宇宙技术的关键部件。

为了实现高分辨率和全彩微显示，研究组报道了将蓝色微量子点电致发光（EL）器件和红绿量子点颜色转换器（QDCC）结合在一起的彩色转换微量子点发光二极管（QLED）面板的光刻制作。首先采用光刻技术制作预图像化模板，然后作为衬底制作图像化蓝色微QLED器件，实现了高达6350像素/英寸的超高像素分辨率（像素尺寸从20 μm × 20 μm到2 μm × 2 μm）。值得注意的是，蓝色图案器件的峰值外量子效率（EQE）为7.8%，最大亮度为39472 cd m^-2。

有图案的红色器件的峰值EQE为18%，最大亮度为103,022 cd m^-2。通过将红色和绿色双色QDCC阵列集成在蓝色微QLED的顶部，制作了一个原型全彩色微QLED面板，实现了高达1184像素/英寸的分辨率，峰值EQE为4.8%，最大亮度为10065 cd m^-2。光刻技术制造颜色转换的微QLED提供了一种易于操作的方法来实现具有成本效益的微显示面板。

附：英文原文

Title: Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay

Author: Jing, Yuyu, Yao, Mingyu, Yang, Min, Li, Menglin, Ding, He, Yang, Gaoling, Zhang, Rongjian, Han, Dengbao, Liu, Huan, Zhong, Haizheng

Issue&Volume: 2025-10-20

Abstract: Microdisplay panels are critical components for metaverse technology. Aiming to achieve high-resolution and full-color microdisplay, we report the photolithographic fabrication of color-converted Micro-quantum dot light emitting diodes (QLED) panel by combining blue Micro-QLED electroluminescence (EL) device and red-green quantum dot color converter (QDCC). Pre-patterned templates were firstly photolithographically fabricated and then applied as substrate to fabricate patterned blue Micro-QLED device, achieving an ultra-high pixel resolution up to 6350 pixels per inch (pixel size ranging from 20 μm × 20 μm to 2 μm × 2 μm). Notably, the patterned blue devices achieve a peak external quantum efficiency (EQE) of 7.8% and a maximum brightness of 39,472cdm2. The patterned red devices achieve a peak EQE of 18% and a maximum brightness of 103,022cdm2. By integrating a dual-color red and green QDCC arrays on the top of the blue Micro-QLED, a prototype full-color Micro-QLED panel was fabricated, achieving a resolution up to 1184 pixels per inch with a peak EQE 4.8%, and a maximum brightness of 10 065cdm2. The photolithographic fabrication of color-converted Micro-QLED provides an easy-operated method for achieving cost-effective microdisplay panels.

DOI: 10.1038/s41377-025-02000-y

Source: https://www.nature.com/articles/s41377-025-02000-y