直播时间：2024年6月18日（周二）20：00-22：00

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【直播简介】

北京时间6月18日晚八点，我们邀请到了清华大学李星辉，重庆理工大学陈自然，中国科学院长春光学精密机械与物理研究所李绍娟三位教授主讲，清华大学曹良才教授担任研讨嘉宾，中国科学院长春光学精密机械与物理研究所Light学术出版中心曹金担任主持人，期待你一起加入这场知识盛宴。

【嘉宾介绍】

李星辉

清华大学

光栅感知：光栅干涉测量与数字光栅三维重建

[ABSTRACT]

Gratings owning periodical patterns, are essential approaches for precision measurement and stereoscopic sensing due to their powerful coding/decoding capacities, have long been playing a key role in advanced manufacturing and intelligent interaction. Two main types of gratings are physical surface-relief gratings engraved on solid substrates and digital gratings generated from projection. Physical grating, taking a holographic lithography fabricated grating as example, owns a feature size reaching sub-micron, and whole length of 100mm, expandability to be planar dots/holes array, has been becoming an ideal cooperation target for ultra-high precision multi-axes spatial gesture measurement. Digital grating, taking a structured light pattern an example, is easily generated from a high frequency, high accuracy digital projector, allowing grating patterns tunability both on spatial phase and on spatial frequency, offering powerful images data for digital signal based stereoscopic sensing. This report will streamline the gratings abovementioned, sensing principle, advanced technologies/prototypes, and typical application scenarios of which will be introduced.

周期性分布的光栅结构具有非常重要的信息编解码能力，是精密测量和立体感知的关键手段，在先进制造、智能交互等领域发挥着重要的作用。光栅结构主要可以分为物理型的浮雕光栅和基于条纹投影技术的数字光栅。物理浮雕光栅以全息光刻加工为例，其特征结构可以达到亚微米，长度可达到100mm量级，可以拓展为面阵分布，这为超精密的空间位姿感知提供了具有决定性作用的测量合作目标。数字光栅以条纹结构光为例，可以通过具有高频和高精度特征的投影系统来获得，灵活地实现光栅图案空间相位调制和空间频率调制，为基于图像感知的数字信号处理提供了丰富的数据，完成高性能立体感知。本报告将以光栅为主线，介绍其在上述两方面的基本原理，先进技术，成套设备和典型应用场景。

[BIOGRAPHY]

Prof. Xinghui LI is the Associate Professor at Shenzhen International Graduate School (SIGS), Tsinghua University, Shenzhen, China, where he leads the “Optical Precision Nanometrology” Group. Prof. Li received this Ph.D. in Nanomechanics from Tohoku University, Japan (2014), M. S. in Mechatronics Engineering from Xi’an Jiaotong University, China (2011), and B.S. in Mechanical Design, Manufacturing and Its Automation from Wuhan University, China (2008). From 2014, Prof. Li worked as a postdoctoral fellow, Lecturer, Assistant Professor and Associate Professor in current institution. Prof. Li is an innovative scientist with extensive experience on grating interferometry, grating lithography fabrication, spectrum analysis and chromatic sensing, imaging processing and 3D reconstruction. He has published papers in top international journals, including IEEE TIM, MINE, Measurement, Computers in Industry, etc. He has been granted by NSFC, Provincial Key Project, Outstanding Funding from National Postdoctoral Committee, etc. He has been selected to Top 2% scientist (2023 single year), awarded “Highly Cited Award”, “Outstanding Contribution Award” of Journal NMME, etc.

李星辉教授是清华大学深圳国际研究生院副教授，博士生导师，长期从事光学精密纳米测量领域的研究。李教授于2014年获得日本东北大学纳米力学博士学位，2011年获得中国西安交通大学机械电子工程学位，2008年获得中国武汉大学机械设计制造及其自动化学位。2014年以来李教授一直在清华大学深圳国际研究生院工作，先后任博士后研究院，讲师，助理教授和副教授。李教授的研究领域为光载信息，在光学干涉测量、光栅光刻制造、光谱分析与共焦测量、图像处理与数字光栅三维重建等方面拥有丰富的经验。他在国际知名期刊发表多篇论文，包括《Microsystems & Nanoengineering》、《IEEE TIM》、《Computers in Industry》、《Measurement》等。在上述领域获得国家自然科学基金面上项目、广东省基金重点项目、博士后基金特别资助等多项科研资助。2023年度他被评委全球Top2%科学家，曾获得“Highly Cited Award”、NMME期刊突出贡献奖及多个会议的Best Paper Award。

陈自然

重庆理工大学

基于交变磁场平面二维时栅位移传感机理及测量模型研究

[ABSTRACT]

Aiming at the technical bottlenecks of traditional two-dimensional displacement measurement technology, such as the ultra-precision lithography technology, the manufacturing of the sensor with large area, two-dimensional cooperative responses and the integrated signal processing, a two-dimensional displacement measurement method based on alternating magnetic field was presented. The exciting sine / cosine winding are arranged evenly and uniformly-spaced in the substrate of the fixed ruler, and the exciting electric current with time quadrature were applied to the exciting winding, and the two-dimensional alternating magnetic field required for measurement was established, which built the mapping relationship between the spatial two-dimensional displacement and the time reference. The spatial two-dimensional displacement measurement was realized by the measurement model of "dimension judgment + displacement decoupling". The dimension judgment was carried out by the logical combination benefiting from the binarization of the output signal of dimension- judgment induction winding array. The alternating magnetic field was picked up by the displacement-decoupling induction winding array with two- dimensions differential arrangement, and the spatial traveling-wave signals were obtained, and the displacement decoupling were realized by phase comparison. A three-dimensional measurement model was established, and the error analysis of the two-dimensional time-gating displacement measurement model was analyzed by electromagnetic simulation. A prototype was developed and an experimental platform was set up. The experimental results showed that in the effective measurement range of 120mm×120mm, the maximum measurement error of X direction was not more than ±9.4μm, the maximum measurement error of Y direction was not more than ±9.7μm, and the resolution was 0.15µm. The planar two-dimensional displacement sensor had the advantages of simple structure, fast signal decoupling, good stability and low cost, which demonstrated the significant value in theoretical research and engineering application.

针对传统二维位移测量技术在超精密光刻、大面积传感器制造、二维协同性响应和信号集成处理的技术瓶颈，提出了一种基于交变磁场的平面二维位移测量方法。采用在定尺平面两维空间均匀等间距布置正弦/余弦激励绕组，施加时间正交激励电流，构建空间二维交变磁场，建立空间二维位移和时间基准的映射关系。通过“维度判断+位移解耦”的组合测量模型实现平面二维位移测量，利用动尺维度判断感应绕组阵列输出信号经二值化后的组合逻辑来进行维度判断；利用动尺两维差动布置的位移感应绕组阵列拾取交变磁场，得到空间位移行波信号，通过比相实现二维位移解耦。建立了三维测量模型，通过电磁仿真，对平面二维时栅位移测量模型进行误差分析。研制了样机，搭建了实验平台，实验结果表明，传感器在120mm×120mm的有效测量范围内，X方向测量误差最大不超过±9.4μm， Y方向测量误差最大不超过±9.7μm，分辨力为0.15 µm。该平面二维位移传感器具有结构简单、信号解耦快捷、稳定性好、成本低等优势，具有重要的理论研究意义和工程应用价值。

[BIOGRAPHY]

Prof. Ziran Chen, Chongqing Talents·Innovation leader, is the deputy director of Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, and the director of Chongqing Key Laboratory of Time-grating Sensing and Advanced Testing Technology,Chongqing University of Technology. He is mainly engaged in research on precision displacement detection, high-precision displacement sensor and intelligent instrument, etc. As the project leader, he is responsible for 23 scientific research projects, including the project of National Key Research and Development Program of China, 3 National Natural Science Foundation of China (2 general programs, 1 youth program), 17 provincial and ministerial level programs such as Key Technology Innovation Programs of Key Industries of Chongqing. He received Chongqing Award for Technological Invention 1st Prize (ranked No.6) . As the first author or the corresponding author, he has published more than 30 high-level papers in some important journals, such as IEEE Transactions on Instrumentation & Measurement, IEEE Sensors Journal, Transactions of the Institute of Measurement and Control, Journal of Mechanical Engineering, Chinese Journal of Scientific Instrument, Journal of Optics and Precision Engineering. He has obtained 8 authorized invention patents. He is the member of editorial board of the Journal of Photonics, Optics and Precision Engineering.

陈自然，研究员，博士，重庆英才·创新领军人才。现任重庆理工大学机械检测技术与装备教育部工程研究中心副主任、时栅传感及先进检测技术重庆市重点实验室主任。主要从事精密位移检测、高精度位移传感器及智能仪器等领域研究。作为项目负责人主持科研项目23项，其中国家重点研发计划课题1项，国家自然科学基金项目3项(面上项目2项，青年项目1项)，重庆市重点产业共性关键技术创新专项等省部级项目17项。获得重庆市技术发明一等奖（排名第6）等科研奖励。以第一作者或通讯作者在国内外重要刊物如IEEE Transactions on Instrumentation & Measurement, IEEE Sensors Journal, Transactions of the Institute of Measurement and Control、机械工程学报、仪器仪表学报、光学精密工程等权威期刊上发表高水平论文30余篇，授权发明专利8项。兼任SCI期刊Photonics编委、光学精密工程期刊编委等学术兼职。

李绍娟

中国科学院长春光学精密机械与物理研究所

范德华光电器件与异质集成

[ABSTRACT]

Van der Walls (vdW) materials hold rich physical and electrical properties. They have been hailed as the rising star in broadband photonics and optoelectronics, promoting its potential applications in the next-generation miniaturized, low energy-consumption, and high-efficiency photon integrated circuits. In this talk, I introduce our recent research work on broadband photon coupling, detection, and signal processing based on vdW materials. We explored the localized optical fields in vdW crystals, showcasing the long-lived polaritons and waveguide modes in such materials. We also proposed new photodetection mechanisms, photogating-assisted tunneling, and with this new mechanism, the overall performance of the photodetection device has been improved to a higher level; Then we built up new optical coupling architecture based on plasmonic effect and silicon-based heterogeneous signal processing technology, which expands the integration function of optoelectronic components, and achieves applications including infrared imaging and human-machine interactions. With these work, we aim to create opportunities for future on-chip detection system that are highly-integrated and mimic multifunctional functions.

范德华材料具有丰富的物理和电学特性，他们被誉为宽带光子学和光电子学的后起之秀，在下一代小型化、低能耗、高效率光子集成电路中的具有潜在应用。在本次报告中，我将介绍我们在基于范德华材料的宽带光子耦合、检测和信号处理方面的研究工作。我们探索了范德华晶体中的局域光场行为，展示了这类材料中长寿命的极化激元及波导现象。我们还提出新的光电探测机制，即光栅压辅助隧穿，通过这种新机制，将器件对光场的整体感知性能提升到更高的综合水平；进一步，我们建立了基于等离激元的新型光学耦合结构,开发了硅基异质读取技术，实验展示了这种集成结构在红外成像、人机交互等方面的系列应用。通过这些工作，我们旨在为未来开发高度集成的多功能探测感知系统提供新的研究前景。

[BIOGRAPHY]

Shaojuan Li is a professor and deputy director of State Key Laboratory of Luminescence Science and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, China. She received her Ph.D. degree (2013) from Peking University (China) in Microelectronics and Solid Electronics. She has acquired multidisciplinary expertise in materials science, photonics, and nanotechnology. So far, she has published over 70 peer-reviewed journal articles, including Nature, Nature Communications, ACS Nano, Advanced Functional Materials, ACS Photonics, etc. She is a co-inventor on more than 30 patents. Her current research interests include plasmonic, detectors and optical sensors based on low-dimensional materials. She has awarded the Outstanding Youth Fund of the National Natural Science Foundation of China. Her research has been recognized as “Ten advances in Chinese optics –fundamental research”.

李绍娟研究员是中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室副主任。2013年获得北京大学微电子与固体电子学博士学位。具有多年的半导体光电器件方面的研究经验，在材料科学、光子学和纳米技术等多学科交叉领域具有丰富的研究经历。迄今为止，她已经在Nature, ACS Nano, Advanced Functional Materials, Small, ACS Photonics等刊物发表论文70余篇，是 30 多项专利的共同发明人。目前，她的主要研究兴趣是基于低维材料的光探测和集成器件。她是国家自然科学基金优秀青年基金的获得者。她的研究工作也曾获得“中国光学十大进展-基础研究类”。范德华光电器件与异质集成

【主持人】

曹金

中国科学院长春光学精密机械与物理研究所

【研讨嘉宾】

曹良才

清华大学